This article discussed temporal-spatial evolution characteristics of the industrial structure from 1975 to 2010 and its cause in Xinjiang at the county level using the spatial variogram and Kriging interpolation method. The spatial self-organized and spatial correlation characteristic of the industrial structure development were strong. The mechanism of structural differentiation caused by self correlation is quite remarkable, but the scope of spatial correlation effect had a decreasing trend. Before 2000, the sill value increased gradually, while the nugget and its coefficient decreased continuously; after 2000, the sill value started to decrease, while the nugget and its coefficient gradually increased. It implied that spatial difference in industrial structure constantly enhanced, and the influence of structural differentiation increased progressively from 1975 to 2000; however, the difference weakened, and random factor's effect moderately strengthened from 2000 to 2010. The spatial difference is low in the SE-NW direction. Nonetheless, the heterogeneity of economic progress in the NE-SW direction is significant, in which the ladder structure "plateau-plain-depression" came into being. From 1975 to 2000, the inter-regional difference in the industrial structure of NE-SW direction was enlarged. "Plateau" continuously expanded to the most of the region of North Xinjiang and East Xinjiang, on which the peak experienced the space evolution process of "single cluster peaks－tripod structure－Tianshan Mountain North Slope industrial Belt”. The range of “depression” changed little, which mainly concentrated in the southwest of Aksu, Khotan, Kashi. From 2000 to 2010, the inter-regional differences in the industrial structure of NE-SW direction started to shorten. The range of the "plateau" was almost invariant, but recession significantly shortened to Kashi in the southwest direction, which prompted the "plain" to extend ceaselessly. Resource endowment, location condition, historical conditions and the regional development policies contribute to the evolvement of the spatial pattern of industrial structure in Xinjiang. This study also reflects that the driving effect of national critical strategic, including reform and opening up, developing West China, on the temporal-spatial evolution of the industrial structure is more obvious.